Physics and Technology of Crystalline Oxide Semiconductor CAAC-IGZO: Fundamentals (Wiley Series in Display Technology)

Electronic devices based on oxide semiconductors are the focus of much attention, with crystalline materials generating huge commercial success. Indium–gallium–zinc oxide (IGZO) transistors have a higher mobility than amorphous silicon transistors, and an extremely low off-state current.  C-axis aligned crystalline (CAAC) IGZO enables aggressive down-scaling, high reliability, and process simplification of transistors in displays and LSI devices. This original book introduces the CAAC-IGZO structure, and describes the physics and technology of this new class of oxide materials. It explains the crystallographic classification and characteristics of crystalline oxide
semiconductors, their crystallographic characteristics and physical properties, and how this unique material has made a major contribution to the field of oxide semiconductor thin films. Two further books in this series describe  applications of CAAC-IGZO in flat-panel displays and LSI devices.

Key features:

• Introduces the unique and revolutionary, yet relatively unknown crystalline oxide semiconductor CAAC-IGZO
• Presents crystallographic overviews of IGZO and related compounds.
• Offers an in-depth understanding of CAAC-IGZO.
• Explains the fabrication method of CAAC-IGZO thin films.
• Presents the physical properties and latest data to support high-reliability crystalline IGZO based on hands-on experience.
• Describes the manufacturing process the CAAC-IGZO transistors and introduces
  the device application using CAAC-IGZO.
   

基於氧化物半導體的電子設備受到廣泛關注，其中晶體材料帶來了巨大的商業成功。銦鎵鋅氧化物（IGZO）晶體管具有比非晶矽晶體管更高的遷移率和極低的關閉電流。C軸對齊晶體（CAAC）IGZO實現了顯示器和LSI設備中晶體管的積極下縮、高可靠性和工藝簡化。本書介紹了CAAC-IGZO結構，並描述了這種新型氧化物材料的物理和技術。它解釋了晶體氧化物半導體的晶體學分類和特性，以及這種獨特材料如何對氧化物半導體薄膜領域做出重大貢獻。本系列的另外兩本書描述了CAAC-IGZO在平板顯示器和LSI設備中的應用。

主要特點：
- 介紹了獨特且革命性的晶體氧化物半導體CAAC-IGZO，這種材料相對較不知名。
- 提供了IGZO及其相關化合物的晶體學概述。
- 深入了解CAAC-IGZO。
- 解釋了CAAC-IGZO薄膜的製造方法。
- 提供了基於實踐經驗支持高可靠性晶體IGZO的物理特性和最新數據。
- 描述了CAAC-IGZO晶體管的製造過程，並介紹了使用CAAC-IGZO的設備應用。