Foundations of MEMS, 2/e (IE-Paperback)

Chang Liu

Foundations of MEMS, 2/e (IE-Paperback)
  • 出版商: Prentice Hall
  • 出版日期: 2011-02-28
  • 定價: $1,250
  • 售價: 9.8 折 $1,225
  • 語言: 英文
  • 裝訂: Paperback
  • ISBN: 0273752243
  • ISBN-13: 9780273752240
  • 相關分類: 微電子學 Microelectronics

    • 下單後立即進貨 (約5~7天)

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商品描述

<內容簡介>

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

Features

  Concise background information from several engineering domains:
＊ Makes students conversant with unfamiliar concepts and practices that are needed to solve MEMS problems.
＊ Presents exciting new opportunities for a student and practitioner of MEMS to become involved in specific application domains, such as bioengineering, chemistry, nanotechnology, optical engineering, power and energy, and wireless communication.

  Systematic teaching of materials, design, and fabrication issues, in an ascending and widening spiral introduces topics in an ordered and logical progression.

  Critical-thinking challenges foster a deeper understanding of the subject matter and show students how to think like engineers.

  Extensive examples and homework problems help teachers explain difficult concepts and assist students in practicing these concepts.

  Current data and up-to-date materials keep students and researchers abreast of the latest technologies.
<章節目錄>

Chapter 1: Introduction
Chapter 2: First-Pass Introduction to Microfabrication
Chapter 3: Review of Essential Electrical and Mechanical Concepts
Chapter 4: Electrostatic Sensing and Actuation
Chapter 5: Thermal Sensing and Actuation
Chapter 6: Piezoresistive Sensors
Chapter 7: Piezoelectric Sensing and Actuation
Chapter 8: Magnetic Actuation
Chapter 9: Summary of Sensing and Actuation Methods
Chapter 10: Bulk Micromachining and Silicon Anisotropic Etching
Chapter 11: Surface Micromachining
Chapter 12: Process Synthesis: Putting It all Together
Chapter 13: Polymer MEMS
Chapter 14: Micro Fluidics Applications
Chapter 15: Case Studies of Selected MEMS Products

商品描述(中文翻譯)

《MEMS基礎》是一本針對跨學科讀者系統性地教授MEMS（微機電系統）特定知識的入門級教材。劉教授以電氣工程和機械工程的概念，並結合不斷發展的微製造技術，討論了與MEMS領域相關的設計、材料和製造問題，以時間高效和有系統的方式。豐富的例子和問題鞏固了學生對抽象概念的理解，並提供了豐富的機會進行批判性思考。

特點：
- 簡潔的背景資訊來自多個工程領域：使學生熟悉解決MEMS問題所需的陌生概念和實踐。
- 提供了學生和MEMS從業者參與特定應用領域的新機會，如生物工程、化學、納米技術、光學工程、能源和無線通信等。
- 以升序和擴展螺旋的方式系統地教授材料、設計和製造問題，按照有序和邏輯的進展順序引入主題。

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