Cold Plasma Materials Fabrication: Fundamentals To Applications

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Electrical Engineering/Circuits and Devices/Physics/Chemistry Cold Plasma in Materials Fabrication from Fundamentals to Applications Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics:

• The main parameters and classifications of different types of plasma
• Reactions within cold plasmas and between cold plasmas and solid surfaces
• State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials

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