Micro- and Nano-Electro-Mechanical Resonant Transistors (Wiley - IEEE) Hardcover

This book explains the design, analysis and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal–Oxide–Semiconductor (CMOS) resonator devices; currently a hot topic in the semiconductor industry. It also presents the technology, design and modelling of state-of-the-art resonant transistors and their applications as a micromechanical resonator with internal gain, with a particular focus on time and frequency reference applications.

• Includes state-of-the-art reviews and selected lists of references in each chapter.
• Provides descriptions of basic physics for Field-effect Transistor (FET) based motion detection.
• Reports existing technology solutions to implement movable FETs for in-plane and out-of-plane motion detection.
• Highlights the main differences with the existing solid-state technology and provides engineering solutions for fast and successful implementation.
• Discusses the potential of the technology compared to other known transduction principles.