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商品描述
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles.
The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
MEMS is covered from all angles.
The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first
place, rather than having a hybrid solution.
商品描述(中文翻譯)
《CMOS-MEMS》這本書最初是在成功的《Advanced Micro & Nanosystems》系列中出版的。在這本書中，將全球已建立的價值數十億美元的CMOS晶片大規模製造技術與令人著迷且商業前景看好的MEMS新世界結合，從各個角度進行了探討。
本書介紹了這個領域，從製造技術和材料特性方面，到CMOS-MEMS的實際應用，包括各種微型化的物理、化學和生物感測器以及射頻系統。對於電路和系統整合問題的重要知識結束了這篇深入的論述，說明了首先將CMOS和MEMS結合起來的優勢，而不是採用混合解決方案。
