ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS FINFET Technology

Lau, Wai Shing

  • 出版商: World Scientific Pub
  • 出版日期: 2017-10-29
  • 售價: $2,860
  • 貴賓價: 9.5$2,717
  • 語言: 英文
  • 頁數: 248
  • 裝訂: Hardcover - also called cloth, retail trade, or trade
  • ISBN: 9813222158
  • ISBN-13: 9789813222151
  • 相關分類: CMOS半導體
  • 立即出貨 (庫存=1)


The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.